National Institute of Lasers and Optronics

Spectroscopy Division

Material Division

Optronics Division

Agriculture and Biophotonics Division

Laser Development Division

Technical Services Division

Lithography and Nano-functional Materials Group


  • Clean room.
  • Optical lithography system (DUV).
  • ICP etcher.
  • Wet benches.
  • Spincoater.
  • Electrospinning.
  • Spray coating.
  • Sol-gel.
  • Hydrothermal.
  • Muffle furnace.
  • Probe station.

Recent activities

  • Design, fabrication and testing of MEMS devices (Comb drive resonators, high frequency bulk mode resonators, accelerometers, pressure sensors, RF switches)
  • Nanofibers by electrospinning
  • Nanocomposite thin films by spray coating method
  • Polymer based self cleaning nanocomposite surfaces
  • Nanoparticles for targeted drug delivery and biomedical applications
  • Piezoelectric nanostrutures
  • Efficient heat transfer by Nanofluids
  • Metal and metaloxide nanoparticles by Solgel, IGC and hydrothermal methods
  • Magnetic nanoparticles
  • Semiconduting nanostructes for sensing applications